Interference spectrometer with a moving mirror

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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G01B 902

Patent

active

055922929

ABSTRACT:
An interference spectrometer which causes an interference by dividing an output light from a light source into two optical paths and by changing the length of each optical path, and which comprises a moving mirror for changing the optical path lengths, position detecting means for detecting the position of the moving mirror and driving control means for controlling the position of the moving mirror, based on the output from the position detecting means. The spectrometer utilizes leaf springs to support the moving mirror, and the driving control means is driven at the natural frequency of the combined moving mirror and leaf springs and based on the output of the position detecting means. Advantageously, the invention has improved vibration resistance and improved power consumption.

REFERENCES:
patent: 4836678 (1989-06-01), Okaji
patent: 5166749 (1992-11-01), Curbelo et al.
patent: 5239361 (1993-08-01), Burch

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