Interference removal

Details Interference removal Interference removal

1998-06-16

1999-08-31

Kim, Robert H.

Optics: measuring and testing

With plural diverse test or art

25022723, G01N 2322

Patent

active

059460822

ABSTRACT:
An improved method for minimizing interferences from random noise and correlated fluctuations which obscure electrical signals converted from optical emissions. In particular, an improved method for the removal of interferences from optical emission signals during endpoint determination in dry etching processes for the fabrication of micro-electronic devices which derives information in the presence of random noise, correlated fluctuations and periodic modulations of the plasma by maximizing the signal to random noise ratio and minimizing the obscuring effects of correlated fluctuation.

REFERENCES:
patent: 4289188 (1981-09-01), Mitzutani et al.
patent: 4312732 (1982-01-01), Degenkolb et al.
patent: 4455084 (1984-06-01), Webb, Jr. et al.
patent: 4491499 (1985-01-01), Jerde et al.
patent: 4569717 (1986-02-01), Ohgami et al.
patent: 4611919 (1986-09-01), Brooks, Jr. et al.
patent: 4618262 (1986-10-01), Maydan et al.
patent: 4695700 (1987-09-01), Provence et al.
patent: 4707075 (1987-11-01), Fukushima et al.
patent: 4753530 (1988-06-01), Knight et al.
patent: 4896965 (1990-01-01), Goff et al.
patent: 4927485 (1990-05-01), Cheng et al.
patent: 4953982 (1990-09-01), Ebbing et al.
patent: 5045149 (1991-09-01), Nulty
patent: 5059784 (1991-10-01), Northrup
patent: 5077464 (1991-12-01), Ebbing et al.
patent: 5097430 (1992-03-01), Birang
patent: 5151584 (1992-09-01), Ebbing et al.
patent: 5155336 (1992-10-01), Gronet et al.
patent: 5208644 (1993-05-01), Litvak et al.
patent: 5317492 (1994-05-01), Gronet et al.
patent: 5343412 (1994-08-01), Birang
patent: 5414504 (1995-05-01), Litvak et al.
patent: 5487127 (1996-01-01), Gronet et al.
Brochure entitled: "1015 DS Endpoint Detection for Low Exposed Area Plasma Etch," published by: Luxtron Corporation, (6 pages) Rec.
o date.
Operation Manual entitled: "Xinix 1011A Endpoint Controller," published by Xinix, Inc., (Dec., 1983).
Instruction Manual entitled: "Xinix 1011 A.M Endpoint Controller," published by : Xinix, Inc. (Jul. 1986).

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