Interference removal

Details Interference removal Interference removal

1995-05-08

1998-07-28

McGraw, Vincent P.

Optics: measuring and testing

With plural diverse test or art

25022723, G01N 2322

Patent

active

057868867

ABSTRACT:
An improved method for minimizing interferences from random noise and correlated fluctuations which obscure electrical signals converted from optical emissions. In particular, an improved method for the removal of interferences from optical emission signals during endpoint determination in dry etching processes for the fabrication of micro-electronic devices which derives information in the presence of random noise, correlated fluctuations and periodic modulations of the plasma by maximizing the signal to random noise ratio and minimizing the obscuring effects of correlated fluctuation.

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Brochure entitled: "1015 DS Endpoint Detection for Low Exposed Area Plasma Etch, " published by: Luxtron Corporation, (6 pages).
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