Interference measuring probe

Details Interference measuring probe Interference measuring probe

2006-07-25

2006-07-25

Trieu, Van T. (Department: 2636)

Communications: electrical

Condition responsive indicating system

Specific condition

C340S686100

Reexamination Certificate

active

07081825

ABSTRACT:
A method and a device for measuring at least one test surface and a reference test surface having an interference measuring probe which emits a first measuring beam which is aligned with respect to the reference test surface, are described. The measuring probe emits at least one second measuring beam, which is aligned with respect to at least the at least one test surface.

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patent: 19721843 (1999-02-01), None
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