Interference measuring device

Details Interference measuring device Interference measuring device

2005-09-27

2005-09-27

Lee, Andrew H. (Department: 2877)

Optics: measuring and testing

By light interference

Having shearing

Reexamination Certificate

active

06950195

ABSTRACT:
In an interference measuring device, which includes: a coherent beam generating source; a sample to be measured; a lens system for forming an image of the sample to be measured on an observing plane; an interference element for splitting a coherent beam into two systems, and forming an interference image on the observing plane or a plane equivalent thereto; an image pickup element for picking up the interference image on the observing plane; and a calculating device having functions of capturing and storing the interference image converted to electric signals by the image pickup element, and determining the phase distribution changed by the sample to be measured from the interference image by calculation, wherein a means for removing the phase change distribution due to the interference element is provided.

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