Interference measurement apparatus, interference measurement pro

Details Interference measurement apparatus, interference measurement pro Interference measurement apparatus, interference measurement pro

1998-10-30

2000-12-26

Kim, Robert

Optics: measuring and testing

By light interference

For dimensional measurement

356504, G01B 902

Patent

active

061668184

ABSTRACT:
An optical system is fabricated in the form of one device, so that the simplified optical system is realized. A displacement is measured with a high resolving power utilizing an interference fringe. An interference measurement probe 2 receives a coherent light from a light source section 1, and divides the coherent light into a plurality of luminous fluxes. The interference measurement probe 2 emits a plurality of irradiation luminous fluxes at different angles. The plurality of irradiation luminous fluxes form an interference fringe and the interference fringe is irradiated onto an objective 8. A light receiving section 3 is disposed at a position where a reflection luminous flux from the objective 8 interferes, and receives an interference light reflected from the objective 8, thereby outputting a light receiving signal which is converted to an electric signal. A measurement section 4 performs processing for obtaining displacement of positions of the interference measurement probe 2 and the light receiving section 3 as well as displacement of the objective 8. A control section 5 is connected to a driving section 6, and controls the driving section 6 based on a measurement result of the measurement section 4, thereby making a stage 7 move in the Z-direction. On the stage 7, the objective 8 is mounted or provided.

REFERENCES:
patent: 4909629 (1990-03-01), Yokokura et al.
patent: 5329356 (1994-07-01), Tabarelli et al.
patent: 5486923 (1996-01-01), Mitchell et al.

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