Interference film filter and an optical waveguide and a method f

Details Interference film filter and an optical waveguide and a method f Interference film filter and an optical waveguide and a method f

1987-10-27

1989-07-11

Lee, John D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

350164, 350 9634, 427163, 20419229, G02B 528, G02B 610

Patent

active

048465410

ABSTRACT:
An interference film filter and an optical waveguide including a laminate which are deposition-formed by alternate lamination of a first thin film (2,4,10) of amorphous Si.sub.x C.sub.y O.sub.z (x:y:z=1:0.6-1:0-0.5) having refractive index up to 3.4 and a extinction coefficient below 0.1 and a second thin film (3,5,20) of amorphous Si.sub.x O.sub.y C.sub.z (x:y:z=1:1.8-2:0-0.5) having a low refractive index in comparison with that of the first thin film, thereby loss of light of the resultant interference film filter and the optical waveguide is reduced.

REFERENCES:
patent: 3910681 (1975-10-01), Elliott et al.
patent: 3914023 (1975-10-01), Thelen
patent: 3962062 (1976-06-01), Ingrey
patent: 4012119 (1977-03-01), Adams et al.
patent: 4451119 (1984-05-01), Meyers et al.
patent: 4615033 (1986-09-01), Nakano et al.
patent: 4623228 (1986-11-01), Galasso et al.
patent: 4673629 (1987-06-01), Yamazaki et al.
patent: 4707820 (1987-11-01), Sawamura

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