Interference display unit

Details Interference display unit Interference display unit

2006-02-07

2006-02-07

Schwartz, Jordan M. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S242000, C359S315000

Reexamination Certificate

active

06995890

ABSTRACT:
An interference display unit with a first electrode, a second electrode and posts located between the two electrodes is provided. The characteristic of the interference display unit is that the second electrode's stress is released through a thermal process. The position of the second electrode is shifted and the distance between the first electrode and the second electrode is therefore defined. A method for fabricating the structure described as follow. A first electrode and a sacrificial layer are sequentially formed on a substrate and at least two openings are formed in the first electrode and the sacrificial layer. A supporter is formed in the opening and the supporter may have at least one arm on the top portion of the supporter. A second electrode is formed on the sacrificial layer and the supporter and a thermal process is performed. Finally, The sacrificial layer is removed.

REFERENCES:
patent: 4617608 (1986-10-01), Blonder et al.
patent: 5347377 (1994-09-01), Revelli et al.
patent: 5835255 (1998-11-01), Miles
patent: 5959763 (1999-09-01), Bozler et al.
patent: 6674562 (2004-01-01), Miles

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