Interference apparatus for detecting state of wave surface

Details Interference apparatus for detecting state of wave surface Interference apparatus for detecting state of wave surface

1986-05-16

1989-01-17

McGraw, Vincent P.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, 356360, G01B 902

Patent

active

047984686

ABSTRACT:
A plurality of interference beams are obtained by making a pair of beams of reference and test-sample light diverge into a plurality of optical paths; providing phase difference between reference and test-sample beams constituting each of a plurality of pairs of reference and test-sample beams having traveled on the plurality of optical paths. The plurality of interference beams are respectively received by light receiving means such as image pickup elements, and the phase difference between the beams of reference and test-sample light is obtained on the basis of signals relating to the plurality of interference beams supplied from the light receiving means, thus obtaining the state of a wave surface of the test-sample beam. By this intereference apparatus, it is possible for the state of the wave surface to be detected correctly even when the output of a light source such as an eximer layer fluctuates, and it is possible to provide an interference apparatus of a phase modulation interference type which does not need substantially any driving mechanism.

REFERENCES:
patent: 4583855 (1986-04-01), Bareket
"Digital Wavefront Measuring Interferometer for Testing Optical Surfaces and Lenses", Bruning et al., Applied Optics, 11-1974, pp. 2693-2703.

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