Interface unit, lithographic projection apparatus comprising...

Details Interface unit, lithographic projection apparatus comprising... Interface unit, lithographic projection apparatus comprising...

2006-12-05

2006-12-05

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C396S611000

Reexamination Certificate

active

07145643

ABSTRACT:
An interface unit for transferring objects, such as substrates, is presented. The interface unit includes a first object transfer path to transfer objects between a track configured to process objects and a lithographic exposure unit configured to expose objects, wherein the interface unit is also provided with a second object transfer path extending through a closable transfer opening to an external space to transfer objects between the external space and the lithographic exposure unit. Furthermore, the invention relates to a lithographic apparatus provided with a lithographic exposure unit and an interface unit according to the invention.

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