Interface coating for ceramic fibers

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized

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427255, 501 97, 501 96, 501 95, 501 56, C23C 1634, C23C 1652, C04B 3558

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055937284

ABSTRACT:
An improved interface coating for a fibrous material composed of a silicon-containing boron nitride having the general composition BSi.sub.x N.sub.1+1.33x, and containing from 2 wt % to 42 wt % of silicon, with substantially no free silicon present. The coating is formed by CVD using reactant vapors of ammonia and a gaseous source of both boron and silicon which flow into the furnace chamber at a controlled flow ratio to nitride the deposit to form the complex coating.

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M. Maeda and T. Makino; "Low Dielectric Constant Amorphous SiBN Ternary Films Prepared by Plasma Enhanced Deposition"; Jap. Journal Applied Physics; vol. 26 No. 5 pp. 660-665 (1987).

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