Interface apparatus for transporting substrates between substrat

Details Interface apparatus for transporting substrates between substrat Interface apparatus for transporting substrates between substrat

1993-06-22

1994-05-03

Huppert, Michael S.

Material or article handling

Apparatus for charging a load holding or supporting element...

With simultaneous charging and discharging of plural load...

414331, 414416, 4147443, 414937, B65G 4907

Patent

active

053082109

ABSTRACT:
An interface apparatus for transferring substrates between processing apparatus which provide various treatments for the substrates. The interface apparatus includes a transfer mechanism which, during a normal operation, receives substrates from an upstream processing apparatus and delivers the substrates to a downstream processing apparatus. Upon occurrence of a trouble in the downstream processing apparatus, the substrates transported from the upstream processing apparatus to the transfer mechanism are deposited in a substrate storage by a depositing and fetching mechanism. After the trouble is eliminated, the transfer mechanism delivers the substrates taken out of the storage to the downstream processing apparatus.

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