Interdigitated capacitor and method for fabrication thereof

Details Interdigitated capacitor and method for fabrication thereof Interdigitated capacitor and method for fabrication thereof

2006-04-25

2006-04-25

Ha, Nguyen T. (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S321200, C361S301200, C361S301400, C361S306100, C257S253000, C257S254000

Reexamination Certificate

active

07035083

ABSTRACT:
A capacitor for use within a microelectronic product employs a first capacitor plate layer that includes a first series of horizontally separated and interconnected tines. A capacitor dielectric layer separates the first capacitor plate layer from a second capacitor plate layer. The second capacitor plate layer includes a second series of horizontally separated and interconnected tines horizontally interdigitated with the first series of horizontally separated and interconnected tines. The capacitor is formed employing a self-aligned method and the capacitor dielectric layer is formed in a serpentine shape.

REFERENCES:
patent: 6383858 (2002-05-01), Gupta et al.
patent: 6410954 (2002-06-01), Sowlati et al.
patent: 6417535 (2002-07-01), Johnson et al.
patent: 6441419 (2002-08-01), Johnson et al.
patent: 6496355 (2002-12-01), Galvagni et al.
patent: 6563191 (2003-05-01), Casey et al.
patent: 6730994 (2004-05-01), Kinsman
patent: 6740922 (2004-05-01), Jones et al.

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