Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1996-09-05
1999-06-01
Noland, Thomas P.
Measuring and testing
Surface and cutting edge testing
Roughness
356354, 356356, G01B 1130, G01B 902, G01B 904
Patent
active
059089814
ABSTRACT:
A deflection sensor for a microcantilever includes two sets of interdigitated fingers, one (reference) set being attached to the substrate from which the microcantilever extends and the other (movable) set being attached to the tip of the microcantilever. Together the interdigitated fingers form an optical phase grating. The deflection of the microcantilever is measured by directing a light beam against the optical phase grating and detecting the intensity of the reflected light in the first (or other) component of the resulting diffraction pattern. As the microcantilever deflects, the reference and movable fingers move relative to one another creating large variations in the intensity of the zeroth and first order components of the diffraction pattern. To eliminate "1/f" noise the deflection of the microcantilever can be measured using an AC signal.
REFERENCES:
patent: 4626066 (1986-12-01), Levinson
patent: 4854321 (1989-08-01), Buierkski
patent: 5144833 (1992-09-01), Amer et al.
patent: 5221415 (1993-06-01), Albraht et al.
patent: 5245863 (1993-09-01), Kajimure et al.
patent: 5606162 (1997-02-01), Buser et al.
patent: 5627365 (1997-05-01), Chiba et al.
patent: 5694501 (1997-12-01), Alavie et al.
"Dynamic Micromechanics On Silicon: Techniques and Devices", by Kurt E. Peterson, IEEE Transactions On Electron Devices, vol. ED-25, No. 10, Oct. 1978 (pp. 1241, 1243, 1245, 1247, and 1249).
"Polycrystalline Silicon Micromechanical Beams", by R. T. Howe and R. S. Muller, J. Electrochem. Soc.: Solid-State Science And Technology, Jun. 1983 (pp. 1420 to 1423).
"Atomic-Scale Friction Of A Tungsten Tip On A Graphite Surface", by C. Mathew Mate, et al., Physical Review Letters, vol. 59, No. 17, Oct. 26, 1987 (pp. 1942 to 1945).
"From Atoms To Integrated Circuit Chips, Blood Cells, And Bacterial With Atomic Force Microscope", by S.A.C. Gould, et al., J. Vac. Sci. Technol.A8(1) Jan./Feb. 1990 (pp. 369 to 373).
"Deformable Grating Optical Modulator", by O. Solgaard, et al., Optics Letters, vol. 17, No. 9, May 1, 1992 (pp. 688 to 690).
"An Attractive New Way To Pin An ID on Atoms", by Robert F. Service, Science, vol. 264, Jun. 10, 1994 (p. 1532).
"First Images From A Magnetic Resonance Force Microscope" by O. Zuger et al., Appl. Phys. Lett. 63(18), Nov. 1, 1993 (pp. 2496 to 2498).
"Observation Of A Chemical Reaction Using a Micromechanical Sensor", by J. K. Gimzewski et al., Chemical Physics Letters, vol. 217, No. 5,6, Jan. 28, 1994 (pp. 589 to 594).
"A New, Optical-Lever Based Atomic Force Microscope", by P.K. Hansma et al., J. Appl. Phys. 76(2), Jul. 15, 1994 (pp. 796 to 799).
"UHV Cantilever Beam Technique For Quantitative Measurements Of Magnetization, Magnetostriction, And Intrinsic Stress Of Ultrathin Magnetic Films", by M. Weber et al., Physical Review Letters, vol. 73, No. 8, Aug. 22, 1994 (pp. 1166 to 1169).
"Photothermal Spectroscopy With Femtojoule Sensitivity Using A Micromechanical Device", by J. R. Barnes et al., Letters to Nature, Nature, vol. 372, Nov. 3, 1994 (pp. 79-81).
"Micromechanical Sensors For Chemical And Physical Measurements", by E. A. Wachter et al., Rev. Sci. Instrum. 66(6), Jun. 1995 (pp. 3662 to 3667).
"Surface-Micromachined Free-Space Micro-Optical Systems Containing Three-Dimensional Microgratings", by S. S. Lee et al., Applied Physics Letters, Online, 67, 2135 (1995), Jan. 1, 1996 (pp. 1 to 10).
Patent Abstracts of Japan (06-289036) Oct. 18, 1994 "Cantilever and Scanning Force Microscope" Hisao Osawa.
Atalar Abdullah
Manalis Scott R.
Minne Stephen C.
Quate Calvin F.
Board of Trustees of the Leland Stanford Jr. University
Noland Thomas P.
Steuber David E.
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