Interconnection in multi element planar structures

Details Interconnection in multi element planar structures Interconnection in multi element planar structures

1974-09-18

1976-07-13

Wojciechowicz, Edward J.

357 23, 357 55, 357 68, 357 71, H01L 2980, H01L 2906, H01L 2348, H01L 2946

Patent

active

039697452

ABSTRACT:
A field effect transistor wherein at least one of source, drain and gate electrodes on a semiconductor substrate is a multi electrode array above a common conductor on the bottom of the substrate. A conductive connection between electrodes of the array and the common conductor is completed through holes in the substrate.

REFERENCES:
patent: 3604989 (1971-09-01), Haneta et al.
patent: 3648131 (1972-03-01), Stuby

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