Interconnect structure for MEMS device

Details Interconnect structure for MEMS device Interconnect structure for MEMS device

2011-03-29

2011-03-29

Le, Uyen-Chau N (Department: 2874)

Optical waveguides

Temporal optical modulation within an optical waveguide

Reexamination Certificate

active

07916980

ABSTRACT:
An interferometric modulator array is formed with connectors and/or an encapsulation layer with electrical connections. The encapsulation layer hermetically seals the array. Circuitry may also be formed over the array.

REFERENCES:
patent: 2534846 (1950-12-01), Ambrose et al.
patent: 3296530 (1967-01-01), Brooks
patent: 3439973 (1969-04-01), Paul et al.
patent: 3443854 (1969-05-01), Weiss
patent: 3653741 (1972-04-01), Marks
patent: 3656836 (1972-04-01), de Cremoux et al.
patent: 3725868 (1973-04-01), Malmer, Jr. et al.
patent: 3813265 (1974-05-01), Marks
patent: 3955880 (1976-05-01), Lierke
patent: 4099854 (1978-07-01), Decker et al.
patent: 4196396 (1980-04-01), Smith
patent: 4228437 (1980-10-01), Shelton
patent: 4377324 (1983-03-01), Durand et al.
patent: 4389096 (1983-06-01), Hori et al.
patent: 4392711 (1983-07-01), Moraw et al.
patent: 4403248 (1983-09-01), te Velde
patent: 4441791 (1984-04-01), Hornbeck
patent: 4445050 (1984-04-01), Marks
patent: 4459182 (1984-07-01), te Velde
patent: 4482213 (1984-11-01), Piliavin et al.
patent: 4500171 (1985-02-01), Penz et al.
patent: 4518959 (1985-05-01), Ueda et al.
patent: 4519676 (1985-05-01), te Velde
patent: 4531126 (1985-07-01), Sadones
patent: 4566935 (1986-01-01), Hornbeck
patent: 4571603 (1986-02-01), Hornbeck et al.
patent: 4596992 (1986-06-01), Hornbeck
patent: 4615595 (1986-10-01), Hornbeck
patent: 4626840 (1986-12-01), Glasper et al.
patent: 4662746 (1987-05-01), Hornbeck
patent: 4663083 (1987-05-01), Marks
patent: 4666254 (1987-05-01), Itoh et al.
patent: 4681403 (1987-07-01), te Velde et al.
patent: 4710732 (1987-12-01), Hornbeck
patent: 4748366 (1988-05-01), Taylor
patent: 4786128 (1988-11-01), Birnbach
patent: 4790635 (1988-12-01), Apsley
patent: 4856863 (1989-08-01), Sampsell et al.
patent: 4857978 (1989-08-01), Goldburt et al.
patent: 4859060 (1989-08-01), Katagiri et al.
patent: 4900136 (1990-02-01), Goldburt et al.
patent: 4900395 (1990-02-01), Syverson et al.
patent: 4937496 (1990-06-01), Neiger et al.
patent: 4954789 (1990-09-01), Sampsell
patent: 4956619 (1990-09-01), Hornbeck
patent: 4965562 (1990-10-01), Verhulst
patent: 4980775 (1990-12-01), Brody
patent: 4982184 (1991-01-01), Kirkwood
patent: 5018256 (1991-05-01), Hornbeck
patent: 5022745 (1991-06-01), Zayhowski et al.
patent: 5028939 (1991-07-01), Hornbeck et al.
patent: 5037173 (1991-08-01), Sampsell et al.
patent: 5044736 (1991-09-01), Jaskie et al.
patent: 5061049 (1991-10-01), Hornbeck
patent: 5075796 (1991-12-01), Schildkraut et al.
patent: 5078479 (1992-01-01), Vuilleumier
patent: 5079544 (1992-01-01), DeMond et al.
patent: 5083857 (1992-01-01), Hornbeck
patent: 5096279 (1992-03-01), Hornbeck et al.
patent: 5099353 (1992-03-01), Hornbeck
patent: 5124834 (1992-06-01), Cusano et al.
patent: 5136669 (1992-08-01), Gerdt
patent: 5142405 (1992-08-01), Hornbeck
patent: 5142414 (1992-08-01), Koehler
patent: 5153771 (1992-10-01), Link et al.
patent: 5162787 (1992-11-01), Thompson et al.
patent: 5168406 (1992-12-01), Nelson
patent: 5170156 (1992-12-01), DeMond et al.
patent: 5172262 (1992-12-01), Hornbeck
patent: 5179274 (1993-01-01), Sampsell
patent: 5192395 (1993-03-01), Boysel et al.
patent: 5192946 (1993-03-01), Thompson et al.
patent: 5206629 (1993-04-01), DeMond et al.
patent: 5206632 (1993-04-01), Dupont et al.
patent: 5212582 (1993-05-01), Nelson
patent: 5214419 (1993-05-01), DeMond et al.
patent: 5214420 (1993-05-01), Thompson et al.
patent: 5216537 (1993-06-01), Hornbeck
patent: 5226099 (1993-07-01), Mignardi et al.
patent: 5228013 (1993-07-01), Bik
patent: 5231532 (1993-07-01), Magel et al.
patent: 5233385 (1993-08-01), Sampsell
patent: 5233456 (1993-08-01), Nelson
patent: 5233459 (1993-08-01), Bozler et al.
patent: 5254980 (1993-10-01), Hendrix et al.
patent: 5272473 (1993-12-01), Thompson et al.
patent: 5278652 (1994-01-01), Urbanus et al.
patent: 5280277 (1994-01-01), Hornbeck
patent: 5285196 (1994-02-01), Gale
patent: 5287096 (1994-02-01), Thompson et al.
patent: 5293272 (1994-03-01), Jannson et al.
patent: 5296950 (1994-03-01), Lin et al.
patent: 5305640 (1994-04-01), Boysel et al.
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5312513 (1994-05-01), Florence et al.
patent: 5323002 (1994-06-01), Sampsell et al.
patent: 5324683 (1994-06-01), Fitch et al.
patent: 5325116 (1994-06-01), Sampsell
patent: 5326430 (1994-07-01), Cronin et al.
patent: 5327286 (1994-07-01), Sampsell et al.
patent: 5331454 (1994-07-01), Hornbeck
patent: 5339116 (1994-08-01), Urbanus et al.
patent: 5345328 (1994-09-01), Fritz et al.
patent: 5355357 (1994-10-01), Yamamori et al.
patent: 5358601 (1994-10-01), Cathey
patent: 5365283 (1994-11-01), Doherty et al.
patent: 5381232 (1995-01-01), Van Wijk
patent: 5381253 (1995-01-01), Sharp et al.
patent: 5401983 (1995-03-01), Jokerst et al.
patent: 5411769 (1995-05-01), Hornbeck
patent: 5444566 (1995-08-01), Gale et al.
patent: 5446479 (1995-08-01), Thompson et al.
patent: 5448314 (1995-09-01), Heimbuch et al.
patent: 5452024 (1995-09-01), Sampsell
patent: 5454906 (1995-10-01), Baker et al.
patent: 5457493 (1995-10-01), Leddy et al.
patent: 5457566 (1995-10-01), Sampsell et al.
patent: 5459602 (1995-10-01), Sampsell
patent: 5459610 (1995-10-01), Bloom et al.
patent: 5461411 (1995-10-01), Florence et al.
patent: 5474865 (1995-12-01), Vasudev
patent: 5489952 (1996-02-01), Gove et al.
patent: 5497172 (1996-03-01), Doherty et al.
patent: 5497197 (1996-03-01), Gove et al.
patent: 5499037 (1996-03-01), Nakagawa et al.
patent: 5499062 (1996-03-01), Urbanus
patent: 5500635 (1996-03-01), Mott
patent: 5500761 (1996-03-01), Goossen et al.
patent: 5506597 (1996-04-01), Thompson et al.
patent: 5515076 (1996-05-01), Thompson et al.
patent: 5517347 (1996-05-01), Sampsell
patent: 5523803 (1996-06-01), Urbanus et al.
patent: 5526051 (1996-06-01), Gove et al.
patent: 5526172 (1996-06-01), Kanack
patent: 5526327 (1996-06-01), Cordova, Jr.
patent: 5526688 (1996-06-01), Boysel et al.
patent: 5535047 (1996-07-01), Hornbeck
patent: 5544268 (1996-08-01), Bischel et al.
patent: 5548301 (1996-08-01), Kornher et al.
patent: 5551293 (1996-09-01), Boysel et al.
patent: 5552924 (1996-09-01), Tregilgas
patent: 5552925 (1996-09-01), Worley
patent: 5559358 (1996-09-01), Burns et al.
patent: 5563398 (1996-10-01), Sampsell
patent: 5567334 (1996-10-01), Baker et al.
patent: 5570135 (1996-10-01), Gove et al.
patent: 5579149 (1996-11-01), Moret et al.
patent: 5581272 (1996-12-01), Conner et al.
patent: 5583688 (1996-12-01), Hornbeck
patent: 5589852 (1996-12-01), Thompson et al.
patent: 5597736 (1997-01-01), Sampsell
patent: 5600383 (1997-02-01), Hornbeck
patent: 5602671 (1997-02-01), Hornbeck
patent: 5606441 (1997-02-01), Florence et al.
patent: 5608468 (1997-03-01), Gove et al.
patent: 5610438 (1997-03-01), Wallace et al.
patent: 5610624 (1997-03-01), Bhuva
patent: 5610625 (1997-03-01), Sampsell
patent: 5614937 (1997-03-01), Nelson
patent: 5619059 (1997-04-01), Li et al.
patent: 5619365 (1997-04-01), Rhoads et al.
patent: 5619366 (1997-04-01), Rhoads et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 5633652 (1997-05-01), Kanbe et al.
patent: 5636052 (1997-06-01), Arney et al.
patent: 5636185 (1997-06-01), Brewer et al.
patent: 5638084 (1997-06-01), Kalt
patent: 5638946 (1997-06-01), Zavracky
patent: 5641391 (1997-06-01), Hunter et al.
patent: 5646768 (1997-07-01), Kaeriyama
patent: 5650881 (1997-07-01), Hornbeck
patent: 5654741 (1997-08-01), Sampsell et al.
patent: 5657099 (1997-08-01), Doherty et al.
patent: 5659374 (1997-08-01), Gale, Jr. et al.
patent: 5661591 (1997-08-01), Lin et al.
patent: 5665997 (1997-09-01), Weaver et al.
patent: 5673139 (1997-09-01), Johnson
patent: 5683591 (1997-11-01), Offenberg
patent: 5703710 (1997-12-01), Brinkman et al.
patent: 5710656 (1998-01-01), Goossen
patent: 5726480 (1998-03-01), Pister
patent: 5739945 (1998-04-01), Tayebati
patent: 5740150 (1998-04-01), Uchimaru et al.
patent: 5745193 (1998-04-01), Urbanus et al.
patent: 5745281 (1998-04-01), Yi et al.
patent: 5751469 (1998-05-01), Arney et al.
patent: 5771116 (1998-06-01), Miller et al.
patent: 5784190 (1998-07-01), Worley
patent: 5784212 (1998-07-01), Hornbe

Affiliated with

Also associated with

Rating

Interconnect structure for MEMS device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Interconnect structure for MEMS device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Interconnect structure for MEMS device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2676990