Interchangeable CVD chuck surface

Details Interchangeable CVD chuck surface Interchangeable CVD chuck surface

1992-02-04

1995-07-11

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Work support

118728, 118500, 118503, C23C 1600

Patent

active

054317371

ABSTRACT:
A chuck in a coating chamber in a CVD system has a hearth for providing heat to a substrate and an interchangeable chuck surface mounted on the hearth for supporting a substrate to be coated during processing. In preferred embodiment there are a plurality of chucks in a system. Excessive coating on surfaces in the CVD chamber other than substrate surfaces to be coated is substantially removed periodically by venting the chamber and replacing the interchangeable chuck faces. Also in a preferred embodiment, an interlocking feature operable by temperature is provided to secure the chuck faces during operation and to release them for interchanging. Also in a preferred embodiment heat transfer between the hearth and the chuck is enhanced by rings and grooves that increase surface area for heat transfer.

REFERENCES:
patent: 5044943 (1991-09-01), Bowman
patent: 5160544 (1992-11-01), Garg

Affiliated with

Also associated with

Rating

Interchangeable CVD chuck surface does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Interchangeable CVD chuck surface, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Interchangeable CVD chuck surface will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-500690