Optics: measuring and testing – Position or displacement
Reexamination Certificate
2006-11-28
2006-11-28
Nguyen, Sang H. (Department: 2877)
Optics: measuring and testing
Position or displacement
C033S503000, C033S559000, C073S001790, C702S095000
Reexamination Certificate
active
07142313
ABSTRACT:
An interaxis-angle correction method comprising: a reference sphere measurement step of scanning, with the sensor, a reference sphere located on the table, in the measurement-axis direction at a translation-axis-direction position on the reference sphere to acquire measurement-axis-direction contour information, and performing the scanning at a plurality of different translation-axis-direction positions on the same reference sphere, with the table being linearly translated; a peak detection step of detecting a peak point in the measurement-axis-direction contour information, and performing the detection for each set of measurement-axis-direction contour information; an error information acquisition step of obtaining information related to the inclination of an actual straight line based on each peak point with respect to an ideal straight line; a correction information acquisition step of obtaining correction information for correcting a measurement error related to the position in the measurement-axis direction, caused by the inclination of the actual straight line; and a correction step.
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Japanese Patent Abstract Publication No. 2003-302202 published Oct. 24, 2003, Application No. 2002-106827, filed Apr. 9, 2002, 29 pages.
Ishitoya Takao
Takemura Fumihiro
Mitutoyo Corporation
Nguyen Sang H.
Rankin, Hill Porter & Clark LLP
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