Intensity distribution simulating method

Details Intensity distribution simulating method Intensity distribution simulating method

1995-01-31

1997-07-01

Pham, Hoa Q.

Optics: measuring and testing

Lamp beam direction or pattern

355 67, 359619, G01J 100, G02B 2710

Patent

active

056443900

ABSTRACT:
In an intensity distribution simulation method for a demagnification projection aligner, the light intensity distribution due to each of unit lenses constituting an integrator is approximated with a Gaussian-distribution approximate equation to thereby model the integrator, and the light intensity distribution of a reticle pattern (mask pattern) on an image plane is calculated on the basis of the calculated light intensity distribution of the modeled integrator.

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M. Yeung, Modeling Aerial Images in Two and Three Dimensions, Proceedings of the Kodak Microelectronics seminar Interface '85, 1986, pp. 115-126.
M. Born et al., Principles of Optics Electromagnetic Theory of Propagation, Interference and Diffraction of Light, pp. 491-555.

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