Intensity-based optical waveguide sensor

Optics: measuring and testing – Material strain analysis – By light interference detector

Reexamination Certificate

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Details

C073S800000

Reexamination Certificate

active

06850315

ABSTRACT:
The invention relates to polymeric/semiconductor thin film strain gauges comprising visible light from spectrometer (10) which is directed onto a thin film passive sensor (12) having a transparent glass substrate (14) and a laminated construction in succession from the substrate (14), of a polyimide layer(18a) a polysiloxane layer (16a) filled with alumina particles, a polyimide layer (18b) and a polysiloxane layer (16b) filled with alumina particles.

REFERENCES:
patent: 4756606 (1988-07-01), Jewell et al.
patent: 4781056 (1988-11-01), Noel et al.
patent: 4937134 (1990-06-01), Schrenk et al.
patent: 5094517 (1992-03-01), Franke
patent: 5120966 (1992-06-01), Kondo
patent: 6281976 (2001-08-01), Taylor et al.

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