Intelligent usage of first pass defect data for improved statist

Details Intelligent usage of first pass defect data for improved statist Intelligent usage of first pass defect data for improved statist

1997-12-12

1999-12-07

Do, Diep N.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324765, 438 17, 36446817, 382149, 702 35, G01R 2126, H01L 2166, G06K 900

Patent

active

059990031

ABSTRACT:
A method to accurately classify defects on a semiconductor wafer wherein a scanning tool detects defects and assigns values to parameters that are characteristic of each defect. The values of the characteristic parameters represent a thumbprint of each defect and the defects are placed into "bins" according to the thumbprint of each defect. A sample of defects in each bin is analyzed and assigned a classification code.

REFERENCES:
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patent: 5649169 (1997-07-01), Berezin et al.
patent: 5777901 (1998-07-01), Berezin et al.
patent: 5801965 (1998-09-01), Takagi et al.
patent: 5828778 (1998-10-01), Hagi et al.
patent: 5862055 (1999-01-01), Chen et al.

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