Intelligent test line system

Details Intelligent test line system Intelligent test line system

1994-12-14

1997-06-03

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

371 221, 364490, G06F 9455, G01R 104, G01R 428

Patent

active

056358504

ABSTRACT:
Process information obtained by a process section is input to a host computer. The process information includes information about a film, information about etching, information about cleaning, information about heat treatment, and information about a test. Yield information obtained by a D/S section is also input to the host computer. The host computer classifies wafers or lots into a plurality of quality ranks on the basis of these pieces of information, and supplies process conditions determined on the basis of the quality ranks to a burn-in section and a test section. The burn-in section and the test section respectively execute screening tests on the basis of the process conditions.

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patent: 5406212 (1995-04-01), Hashinaga et al.
patent: 5539652 (1996-07-01), Tegethoff

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