Intelligent modelling of process and tool health

Data processing: measuring – calibrating – or testing – Testing system

Reexamination Certificate

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C714S025000

Reexamination Certificate

active

07020569

ABSTRACT:
The health of a tool is predicted based on temporally ordered input data representing parameters indicative of tool health. A sliding time window is used to partition input data into temporally displaced data sets. Non-linear regression models determine, based on the data sets, a set of predictive values relating to tool health at a future time. A tool-health metric is then determined based on one or more of the predictive values.

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