Data processing: measuring – calibrating – or testing – Testing system
Reexamination Certificate
2006-03-28
2006-03-28
Raymond, Edward (Department: 2857)
Data processing: measuring, calibrating, or testing
Testing system
C714S025000
Reexamination Certificate
active
07020569
ABSTRACT:
The health of a tool is predicted based on temporally ordered input data representing parameters indicative of tool health. A sliding time window is used to partition input data into temporally displaced data sets. Non-linear regression models determine, based on the data sets, a set of predictive values relating to tool health at a future time. A tool-health metric is then determined based on one or more of the predictive values.
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Cao An
Card Jill P.
Chan Wai T.
Ibex Process Technology, Inc.
Raymond Edward
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