Electrical resistors – Resistance value temperature-compensated – With additional compensating resistor or resistance element
Reexamination Certificate
2008-03-18
2008-03-18
Lee, K. Richard (Department: 2832)
Electrical resistors
Resistance value temperature-compensated
With additional compensating resistor or resistance element
C438S382000, C438S384000, C257S363000, C257S516000
Reexamination Certificate
active
11135897
ABSTRACT:
An integrated circuit structure including multiple thin film resistors having different sheet resistances and TCRs includes a first oxide layer (2) formed on a semiconductor substrate (1), a first thin film resistor (3) disposed on the first oxide layer (2), and a second oxide layer (14) disposed over the first oxide layer (2) and first thin film resistor (3). A second thin film resistor (15) is formed on the second oxide layer (14) and a third oxide layer (16) is formed over the second thin film resistor (15) and the second oxide layer (14). Interconnect metallization elements (12A,B &22A,B) disposed on at least one of the second (14) and third (16) oxide layers electrically contact the circuit element (4), terminals of the first thin film resistor (3), and terminals of the second thin film resistor (15), respectively, through corresponding contact openings through at least one of the second (14) and third (16) oxide layers.
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Brady III W. James
Lee K. Richard
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
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