Integration of photon emission microscope and focused ion beam

Details Integration of photon emission microscope and focused ion beam Integration of photon emission microscope and focused ion beam

2007-07-17

2007-07-17

Nguyen, Ha Tran (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C216S061000

Reexamination Certificate

active

10985808

ABSTRACT:
An integrated FIB/PEM apparatus and method for performing failure analysis on integrated circuits. In-situ failure analysis is enabled by integrating Photon Emission Microscopy into a Focused Ion Beam system, thereby improving throughput and efficiency of Failure Analysis. An iterative method is described for identifying and localizing fault sites on the circuit.

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