Integration of laser with photodiode for feedback control

Details Integration of laser with photodiode for feedback control Integration of laser with photodiode for feedback control

1995-10-18

1996-11-19

Bovernick, Rodney B.

Coherent light generators

Particular resonant cavity

Distributed feedback

372 50, 257 85, H01S 318, H01L 3112

Patent

active

055770649

ABSTRACT:
Photodiodes are integrally formed with vertical cavity surface emitting lasers (VCSELs) and superluminescent light emitting diodes (SLEDs) for monitoring optical radiation intensities. In different embodiments, the photodiode is epitaxially formed within a mirror of a VCSEL, non-epitaxially formed on top of a VCSEL, non-epitaxially formed on side of a VCSEL, or formed on the substrate on the side opposite the VCSEL. A lateral injection vertical cavity surface emitting laser is also disclosed for integration with a lateral PIN photodiode. A photodiode having the same epitaxial layers as a VCSEL is also integrally formed alongside of the VCSEL. Similar devices using SLEDs are also disclosed.

REFERENCES:
patent: 5136603 (1992-08-01), Hasnain et al.
patent: 5331658 (1994-07-01), Shieh et al.
patent: 5475701 (1995-12-01), Hibbs-Brenner

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