Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element
Patent
1995-10-13
2000-03-14
Kunemund, Robert
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Including integrally formed optical element
438 30, 438 32, 438 39, 117956, 372 43, 372 45, H01L 2120
Patent
active
060371897
ABSTRACT:
A method of fabricating an integrated waveguide device includes forming a ridge having a width that varies in a tapered shape along the [011] direction on a semiconductor substrate and growing a laminated layer structure including a light waveguide layer where the width varies in a tapered shape of the ridge so that a waveguide has a tapered shape in the laminated layer structure, thereby producing an integrated waveguide device having a tapered light waveguide. The thickness of the semiconductor layer and the wavelength guided by the waveguide are controlled with high precision and the reliability of the device is enhanced.
REFERENCES:
patent: 3900863 (1975-08-01), Kim
patent: 5313484 (1994-05-01), Arimoto
patent: 5436195 (1995-07-01), Kimura et al.
patent: 5522005 (1996-05-01), Moretti et al.
patent: 5580818 (1996-12-01), Sakata
patent: 5656539 (1997-08-01), Motoda et al.
Shahar, et al., "Dynamic Etch Mask Technique for Fabricating Tapered Semiconductor Optical Waveguides and Other Structures", Appl. Phys. Lett. vol. 56, No. 12, Mar. 19, 1990.
Brenner et al., "Intergrated Optical Modeshape Adapters in InGaAsP/InP for Efficient Fiber-to-Waveguide Coupling", IEEE Photonics Tech. Letters, vol. 5, No. 9, Sep. 1993.
Yoshikawa et al, "A Self-Aligned Ridge Substrate Laser Fabricated By Single-Step MOVPE", Journal of Crystal Growth, vol. 93, 1988, pp. 843, 847, and 849.
Kunemund Robert
Mitsubishi Denki & Kabushiki Kaisha
LandOfFree
Integrated waveguide device and method of fabricating the integr does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Integrated waveguide device and method of fabricating the integr, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated waveguide device and method of fabricating the integr will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-168610