Integrated waveguide device and method of fabricating the integr

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element

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438 30, 438 32, 438 39, 117956, 372 43, 372 45, H01L 2120

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active

060371897

ABSTRACT:
A method of fabricating an integrated waveguide device includes forming a ridge having a width that varies in a tapered shape along the [011] direction on a semiconductor substrate and growing a laminated layer structure including a light waveguide layer where the width varies in a tapered shape of the ridge so that a waveguide has a tapered shape in the laminated layer structure, thereby producing an integrated waveguide device having a tapered light waveguide. The thickness of the semiconductor layer and the wavelength guided by the waveguide are controlled with high precision and the reliability of the device is enhanced.

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Yoshikawa et al, "A Self-Aligned Ridge Substrate Laser Fabricated By Single-Step MOVPE", Journal of Crystal Growth, vol. 93, 1988, pp. 843, 847, and 849.

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