Integrated wafer fabrication production characterization and...

Data processing: structural design – modeling – simulation – and em – Simulating nonelectrical device or system

Reexamination Certificate

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Reexamination Certificate

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06889178

ABSTRACT:
An integrated wafer fab production scheduling and simulation system incorporates a manufacturing execution system with a scheduling system based on simulation. The integrated system provides manufacturers with a simulation tool integrated with the manufacturing execution system to evaluate proposed production control logic as a practical alternative to expensive experimentation on an actual production system. Furthermore, simulation models are used to create short-term dispatch schedules to steer daily manufacturing operations towards planned performance goals. Innovative features include integration of preventive maintenance scheduling, Kanban based WIP control, an integrated time standard database, and real time lot move updates.

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