Optical waveguides – Integrated optical circuit
Patent
1990-06-27
1991-12-24
Healy, Brian
Optical waveguides
Integrated optical circuit
359291, 359297, 359665, 359667, 357 26, 357 28, 25022725, 250573, 25023119, 250238, 251 11, 137829, 385 33, 385147, G02B 612, H01L 2984, H01J 516, F16K 3100
Patent
active
050746294
ABSTRACT:
A variable focal length lens integrated onto a silicon wafer. A light transmitting material such as gas or liquid is entrapped in a cavity in the wafer. The cavity has a flexible, light transmitting wall. The wall provides one surface of the lens. When the material inside the cavity is heated or cooled, the wall flexes and the focal length of the lens changes. The lens is suitable for use in temperature and pressure sensors, fiber optic communication networks, optical computers, and other applications.
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Fish Richard C.
Healy Brian
Stanford University
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