Integrated varactor switches for acoustic ink printing

Details Integrated varactor switches for acoustic ink printing Integrated varactor switches for acoustic ink printing

1994-09-30

1996-12-31

Lund, Valerie

Incremental printing of symbolic information

Ink jet

Ejector mechanism

347 12, 437 60, 437919, 361281, 310313R, 307 73, 148DIG14, B41J 207, H02J 100

Patent

active

055898645

ABSTRACT:
An integrated varactor and piezoelectric device for an acoustic ink jet ejector includes a substrate having a first surface, the silicon substrate forming a first electrode, an epitaxial layer formed over the first surface of the silicon substrate, a silicon dioxide layer formed over the epitaxial layer, a second electrode formed over the silicon dioxide, a piezoelectric layer formed over the second electrode, a third electrode formed over the piezoelectric layer and an acoustic lens formed over a second surface of the silicon substrate. The acoustic lens is aligned with the center of the piezoelectric layer generally along an axis perpendicular to the first and second surfaces of the silicon substrate.

REFERENCES:
patent: 3648340 (1972-03-01), Maclver
patent: 4250384 (1981-10-01), Pulvari
patent: 4751530 (1988-06-01), Elrod et al.
patent: 4782350 (1988-11-01), Smith et al.
patent: 5038184 (1991-08-01), Chiang et al.
patent: 5166646 (1992-11-01), Avanic et al.
patent: 5389956 (1995-02-01), Hadimioglu et al.

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