Fluid handling – Systems – With pump
Patent
1999-06-23
2000-12-19
Rivell, John
Fluid handling
Systems
With pump
13759911, 13760115, E03B 500
Patent
active
061615765
ABSTRACT:
A gas delivery system comprises a gate valve that can be connected between a turbo pump and a process chamber. The gate valve includes a valve body, a valve seat and a housing constructed to support the valve seat, wherein (a) the valve body is secured within the housing so as to move relative to the valve seat between an opened position and a closed position, and (b) the housing is provided with a gas passageway connected to each of the spaces on opposite sides of the valve body when the valve body is in the closed position. A plurality of valves are mounted to the housing of the gate valve and arranged so as to control the flow of gas through the passageway so that in operation the chamber and turbo pump each can be pumped down through the gas passageway with a second pump connected to one of the valves, and gas can be transferred and the flow controlled through the passageway bypassing the valve body when the valve body is in the closed position.
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patent: 5931192 (1999-08-01), Smith et al.
Maher Joseph
Olmsted Richard W.
MKS Instruments Inc.
Rivell John
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