Integrated turbo/drag/regenerative pump with...

Details Integrated turbo/drag/regenerative pump with... Integrated turbo/drag/regenerative pump with...

2006-11-28

2006-11-28

Look, Edward K. (Department: 3745)

Rotary kinetic fluid motors or pumps

Method of operation

C415S061000, C415S062000, C415S064000, C415S069000, C415S143000, C417S016000, C417S202000, C417S423400

Reexamination Certificate

active

07140833

ABSTRACT:
The present invention relates to vacuum pumps and a method for creating and maintaining a high vacuum. A vacuum pump includes a regenerative section and a turbo-molecular section. A common first rotor carries forward-rotating elements of both the regenerative section and the turbo-molecular section. Additionally, a second rotor carries counter-rotating elements of the turbo-molecular section. A first drive rotates the first rotor in a forward rotational direction while a second drive rotates the second rotor in a counter-rotational direction. The drives may be controlled to drive the common first rotor on start-up, and to later drive the second rotor.

REFERENCES:
patent: 4717315 (1988-01-01), Miki et al.
patent: 4878813 (1989-11-01), Miki
patent: 6106223 (2000-08-01), Leyshon
patent: 6116032 (2000-09-01), Mori et al.
patent: 6135709 (2000-10-01), Stones
patent: 6709228 (2004-03-01), Stuart
patent: 6752588 (2004-06-01), Kawanishi et al.
patent: 688708 (1979-09-01), None

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