Oscillators – Solid state active element oscillator – Significant distributed parameter resonator
Patent
1992-02-07
1992-11-24
Grimm, Siegfried H.
Oscillators
Solid state active element oscillator
Significant distributed parameter resonator
331108C, 331177R, 333193, 334 15, 257312, H03B 536, H03H 925, H03H 964
Patent
active
051666464
ABSTRACT:
An integrated tunable resonator (100) includes a common semiconductor carrier (110). Formed on the common semiconductor carrier (110) is an integrated voltage variable capacitor (104). A bulk acoustic wave resonator is formed on the common semiconductor carrier (110) and coupled to the voltage variable capacitor (104). In one aspect of the present invention, a thin film resonator (106) is coupled to the voltage variable capacitor (104) both of which are formed on a common semiconductor substrate (110). The combination of these three elements provide for a tunable integrated resonator (100). In another aspect of the present invention, a surface acoustic wave resonator (522), formed on a common semiconductor carrier (514), is coupled to a voltage variable capacitor (520) in order to provide a tunable resonator (500).
REFERENCES:
patent: 4354166 (1982-10-01), Grudkowski
patent: 4890370 (1990-01-01), Fukuda et al.
patent: 4973922 (1990-11-01), Embree et al.
patent: 5075641 (1991-12-01), Weber et al.
Avanic Branko
Benenati Robert L.
Ghomeshi M. Mansour
Grimm Siegfried H.
Motorola Inc.
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