Integrated transport system

Details Integrated transport system Integrated transport system

2005-08-16

2005-08-16

Tran, Khoi H. (Department: 3651)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C700S112000, C414S940000

Reexamination Certificate

active

06931303

ABSTRACT:
A transport system within a fabrication system. The fabrication system contains a plurality of tool bays, each of which has a plurality of processing tools for processing articles. The transport system contains a plurality of intrabay transport subsystems, an interbay transport subsystem, a plurality of stockers, and at least one linking subsystem. Each intrabay transport subsystem is dedicated to transporting articles within a particular tool bay. The interbay transport subsystem, linking the tool bays, transports articles between the tool bays. The stockers, located between the intrabay and interbay transport subsystems, store articles between processing and transfer articles between the intrabay and interbay transport subsystems. The linking subsystem, located between two adjacent intrabay transport subsystems, provides direct transport between the two corresponding tool bays.

REFERENCES:
patent: 5980183 (1999-11-01), Fosnight
patent: 6089811 (2000-07-01), Watanabe et al.
patent: 6468021 (2002-10-01), Bonora et al.
patent: 6580967 (2003-06-01), Jevtic et al.
patent: 6591961 (2003-07-01), Fukushima
patent: 6715978 (2004-04-01), Lin et al.
patent: 6733243 (2004-05-01), Ogata et al.
patent: 6772032 (2004-08-01), Iwasaki et al.
patent: 6821082 (2004-11-01), McGowan

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