Integrated tool with interchangeable wet processing...

Details Integrated tool with interchangeable wet processing... Integrated tool with interchangeable wet processing...

2008-05-13

2008-05-13

Moore, Karla A. (Department: 1792)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

For liquid etchant

C156S345310, C156S345320, C204S198000

Reexamination Certificate

active

10860593

ABSTRACT:
An integrated tool that enables wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.

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