Data processing: generic control systems or specific application – Specific application – apparatus or process – Robot control
Reexamination Certificate
2007-12-25
2007-12-25
Black, Thomas (Department: 3661)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Robot control
C700S249000, C700S250000, C700S258000, C700S259000, C700S260000, C700S261000, C700S262000, C700S264000, C414S744500, C414S744600, C901S049000
Reexamination Certificate
active
10860385
ABSTRACT:
An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.
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Egloff Matthew C.
Erickson James J.
Mattson David P.
Woodruff Daniel J.
Black Thomas
Marc McDieunel
Perkins Coie LLP
Semitool Inc.
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