Stock material or miscellaneous articles – Structurally defined web or sheet – Discontinuous or differential coating – impregnation or bond
Reexamination Certificate
2005-05-10
2005-05-10
Lam, Cathy F. (Department: 1775)
Stock material or miscellaneous articles
Structurally defined web or sheet
Discontinuous or differential coating, impregnation or bond
C428S210000, C174S257000, C174S258000, C361S750000, C361S751000, C361S765000, C361S766000, C361S792000, C361S794000, C361S795000, C361S811000, C361S812000, C363S147000
Reexamination Certificate
active
06890629
ABSTRACT:
A system and method for the fabrication of high reliability capacitors (1011), inductors (1012), and multi-layer interconnects (1013) (including resistors (1014)) on various thin film hybrid substrate surfaces (0501) is disclosed. The disclosed method first employs a thin metal layer (0502) deposited and patterned on the substrate (0501). This thin patterned layer (0502) is used to provide both lower electrodes for capacitor structures (0603) and interconnects (0604) between upper electrode components. Next, a dielectric layer (0705) is deposited over the thin patterned layer (0502) and the dielectric layer (0705) is patterned to open contact holes (0806) to the thin patterned layer. The upper electrode layers (0907, 0908, 1009, 1010) are then deposited and patterned on top of the dielectric (0705).
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Marc De Samber, Nick Pulsford, Marc Van Delden, Robert Milsom; “Low-Complexity MCM-D Technology with Integrated Passives for High Frequency Applications”, The International Journal of Microcircuits and Electronic Packaging, vol. 21, No. 2, Second Quarter 1998, pp. 224-229 (ISSN 1063-1674) (International Microelectronics and Packaging Society) [6 pages].
Casper Michael D.
Mraz William B.
Klughart Kevin Mark
Lam Cathy F.
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