Integrated thermoelectric cooling devices and methods for...

Details Integrated thermoelectric cooling devices and methods for... Integrated thermoelectric cooling devices and methods for...

2004-11-12

2009-06-09

Neckel, Alexa D (Department: 1795)

Batteries: thermoelectric and photoelectric

Thermoelectric

Thermopile

C136S201000

Reexamination Certificate

active

07544883

ABSTRACT:
Semiconductor integrated thermoelectric devices are provided, which are formed having high-density arrays of thermoelectric (TE) elements using semiconductor thin-film and VLSI (very large scale integration) fabrication processes. Thermoelectric devices can be either separately formed and bonded to semiconductor chips, or integrally formed within the non-active surface of semiconductor chips, for example.

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Pierson, Hugh, Handbook of Chemical Vapor Deposition (CVD), 1999, Noyes Publication, Second Edition, 57.

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