Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2007-10-30
2007-10-30
Paik, Sank (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C118S724000
Reexamination Certificate
active
11174782
ABSTRACT:
An integrated thermal unit comprising a bake plate having a substrate holding surface configured to hold and heat a substrate in a baking position and a chill plate having a substrate holding surface configured to hold and cool a substrate in a cooling position where the substrate holding surface of the bake plate is positioned in a first substantially horizontal plane when the bake plate is in the baking position and the substrate holding surface of the chill plate is positioned in a second substantially horizontal plane that is below the first plane when the chill plate is in a cooling position.
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Office Action for U.S. Appl. No. 11/174,781, filed Sep. 11, 2006.
Office Action for U.S. Appl. No. 11/174,988, filed Sep. 11, 2006.
Ishikawa Tetsuya
Quach David H.
Paik Sank
Sokudo Co., Ltd.
Townsend and Townsend / and Crew LLP
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