Integrated thermal unit having a shuttle with two-axis movement

Details Integrated thermal unit having a shuttle with two-axis movement Integrated thermal unit having a shuttle with two-axis movement

2007-10-30

2010-06-22

Paik, Sang Y (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C118S724000

Reexamination Certificate

active

07741585

ABSTRACT:
An integrated thermal unit comprising a bake plate configured to heat a substrate supported on a surface of the bake plate; a chill plate configured to cool a substrate supported on a surface of the chill plate; and a substrate transfer shuttle configured to transfer substrates from the bake plate to the cool plate, wherein the substrate transfer shuttle has a temperature controlled substrate holding surface that is capable of cooling a substrate heated by the bake plate.

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