Integrated thermal unit having a shuttle with a temperature...

Electric heating – Heating devices – Combined with container – enclosure – or support for material...

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C118S724000

Reexamination Certificate

active

07601934

ABSTRACT:
An integrated thermal unit comprising a bake plate configured to heat a substrate supported on a surface of the bake plate; a chill plate configured to cool a substrate supported on a surface of the chill plate; and a substrate transfer shuttle configured to transfer substrates from the bake plate to the cool plate, wherein the substrate transfer shuttle has a temperature controlled substrate holding surface that is capable of cooling a substrate heated by the bake plate.

REFERENCES:
patent: 4718975 (1988-01-01), Bowling et al.
patent: 4985722 (1991-01-01), Ushijima et al.
patent: 5651823 (1997-07-01), Parodi et al.
patent: 6467976 (2002-10-01), Matsuyama et al.
patent: 6499777 (2002-12-01), Wang
patent: 6515731 (2003-02-01), Aimoto et al.
patent: 6518548 (2003-02-01), Sugaya et al.
patent: 6624393 (2003-09-01), Howell et al.
patent: 6639189 (2003-10-01), Ramanan et al.
patent: 6717115 (2004-04-01), Pfahnl et al.
patent: 6814507 (2004-11-01), Inagaki
patent: 7282675 (2007-10-01), Quach et al.
patent: 7297906 (2007-11-01), Quach et al.
Office Action for U.S. Appl. No. 11/174,781, filed Sep. 11, 2006.
Office Action for U.S. Appl. No. 11/174,782, filed Sep. 11, 2006.
International Search Report and Written Opinion of PCT Application No. PCT/US05/46637, dated Feb. 22, 2008.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Integrated thermal unit having a shuttle with a temperature... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated thermal unit having a shuttle with a temperature..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated thermal unit having a shuttle with a temperature... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4076115

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.