Integrated system for tool front-end workpiece handling

Details Integrated system for tool front-end workpiece handling Integrated system for tool front-end workpiece handling

2002-07-12

2008-09-02

Fox, Charles A (Department: 3652)

Material or article handling

Apparatus for charging a load holding or supporting element...

With simultaneous charging and discharging of plural load...

C414S217000, C414S939000

Reexamination Certificate

active

07419346

ABSTRACT:
An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts to the front of a tool associated with a semiconductor process. The front end components, including the load port assemblies, prealigners and workpiece handling robot, are mounted to the plate to provide precise and repeatable positioning of the front end components with respect to each other.

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