Integrated SPM sensor having a photodetector mounted on a probe

Details Integrated SPM sensor having a photodetector mounted on a probe Integrated SPM sensor having a photodetector mounted on a probe

1995-09-12

1999-07-13

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250306, 73105, G01B 734

Patent

active

059230339

ABSTRACT:
An integrated SPM sensor including a cantilever having a probe on its free end, a supporting base for supporting the cantilever on its fixed end, and signal lines for conducting a signal picked up by the probe. The probe is a photodetector element constructed of any of a junction gate-type photo FET, a Schottky gate-type photo FET, an MOS-type photodiode and a Schottky-type photodiode. The integrated SPM sensor substantially lowers noise due to thermally excited dark current and easily detects weak incident light.

REFERENCES:
patent: 5272913 (1993-12-01), Toda et al.
patent: 5386110 (1995-01-01), Toda
patent: 5386720 (1995-02-01), Toda et al.
patent: 5581083 (1996-12-01), Majumdar et al.
patent: 5583286 (1996-12-01), Matsuyama

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