Integrated silicon accelerometer with stress-free rebalancing

Details Integrated silicon accelerometer with stress-free rebalancing Integrated silicon accelerometer with stress-free rebalancing

1983-04-18

1985-02-12

Gill, James J.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 1513

Patent

active

044983425

ABSTRACT:
An accelerometer comprising a member of silicon subjected to physical changes in response to the linear accelerations, elements integrated into the surface of the member for generating, amplifying and supplying an output determined by those changes, and means responsive to said output for overcoming said physical changes.

REFERENCES:
patent: 3030814 (1962-04-01), Ainsworth
patent: 3572109 (1971-03-01), Yerman
patent: 3788149 (1974-01-01), Wilner
patent: 4129042 (1978-12-01), Rosvold
patent: 4186324 (1980-01-01), Hartzell
patent: 4250757 (1981-02-01), Hanson

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