Integrated sensor for force and motion

Electrical resistors – Strain gauge type – Dynamometer type

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Details

338 2, 338 47, 7386265, G01L 122, G01L 118

Patent

active

045889759

ABSTRACT:
An integrated sensor for force and motion, includes a solid insulating material body, a flexible metal strip for force transmission sealed to and extending out of the body, a piezoresistive probe in the form of a silicon wafer fastened on the metal strip in the body for mechanical loading by the metal strip, conductive connections sealed to and extending out of the body for application to an electrical instrument and for voltage supply to the probe, and at least two electrical terminals connected between the silicon wafer and the conductive connections.

REFERENCES:
patent: 3599139 (1971-08-01), Low
patent: 3986254 (1976-10-01), Nordstrom
patent: 4319397 (1982-03-01), Tanabe et al.
patent: 4423640 (1984-01-01), Jetter

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