Integrated sensor

Details Integrated sensor Integrated sensor

1997-04-30

1998-05-26

Dombroske, Geroge M.

Measuring and testing

Fluid pressure gauge

Combined

73716, 73718, 73719, 73725, G01L 700

Patent

active

057568995

ABSTRACT:
The first glass substrate having the first pressure admitting entrance for leading the pressure of fluid to be measured, is arranged at a side of a diaphragm of a pressure sensor, for measuring differential pressure. The second glass substrate is arranged at the side opposite to the first glass substrate, a spacer being sandwiched therebetween. The second pressure admitting entrance is formed at the second glass substrate, at the position opposite to the first presser admitting entrance of the first glass substrate. The first conductive film and the second conductive film are formed on two surfaces facing to each other, of the first and second glass substrates, respectively. By measuring the specific conductance and the dielectric constant of the object fluid between the two conductive films, these physical constants indicating the quality of the fluid, the quality of the fluid can be also detected. Thus, it becomes possible to realize and provide an integrated sensor capable of measuring the differential pressure (flow rate) and the quality of fluid by using one transmitter.

REFERENCES:
patent: 3787764 (1974-01-01), Andeen et al.
patent: 4339719 (1982-07-01), Rhines et al.
patent: 4445383 (1984-05-01), Binder et al.
patent: 4625560 (1986-12-01), Sanders
patent: 4730496 (1988-03-01), Knecht et al.
patent: 4831492 (1989-05-01), Kuisma
patent: 5142912 (1992-09-01), Frische
patent: 5157973 (1992-10-01), Ciminelli
patent: 5353628 (1994-10-01), Bellows
patent: 5469749 (1995-11-01), Shimada et al.
patent: 5515732 (1996-05-01), Willcox et al.
patent: 5629538 (1997-05-01), Lipphardt et al.

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