Integrated sensing platform and method for improved quantitative

Details Integrated sensing platform and method for improved quantitative Integrated sensing platform and method for improved quantitative

1998-03-25

2000-06-20

Williams, Hezron

Measuring and testing

Vibration

By mechanical waves

73 1903, 73 2406, 73 6161, G01H 300

Patent

active

060764066

ABSTRACT:
By measuring two or more physical parameters of a thin sensing film which are altered when exposed to chemicals, more effective discrimination between chemicals can be achieved. In using more than one sensor, the sensors are preferably integrated on the same substrate so that they may measure the same thin film. Even more preferably, the sensors are provided orthogonal to one another so that they may measure the same portion of the thin film. These provisions reduce problems in discrimination arising from variations in thin films.

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patent: 5076094 (1991-12-01), Frye et al.
patent: 5442169 (1995-08-01), Kunz
patent: 5482678 (1996-01-01), Sittler

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