Thermal measuring and testing – Temperature measurement – By electrical or magnetic heat sensor
Patent
1986-06-05
1989-02-28
Cuchlinski, Jr., William A.
Thermal measuring and testing
Temperature measurement
By electrical or magnetic heat sensor
374164, 374 25, 338 22SD, 338 23, G01N 2504, G01K 722, H01C 700
Patent
active
048080098
ABSTRACT:
An integrated sensing device includes a resistance temperature sensor formed in a semiconductor substrate and a resistance heater which is formed on an insulating layer which covers the surface of the semiconductor substrate. The resistance heater has a low temperature coefficient of resistivity and is positioned adjacent the resistance temperature sensor so the current flow through the resistance heater will generate heat which is transferred through the insulating layer to the resistance temperature sensor. The sensing device is applicable to a variety of sensing systems, such as mass flow measurement systems, dew point detection systems, and frost detection systems.
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Bohara Robert C.
Sittler Fred C.
Cuchlinski Jr. William A.
Rosemount Inc.
Will Thomas B.
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