Integrated resonator structure and methods for its...

Details Integrated resonator structure and methods for its... Integrated resonator structure and methods for its...

2007-09-11

2007-09-11

Pascal, Robert (Department: 2817)

Wave transmission lines and networks

Coupling networks

Frequency domain filters utilizing only lumped parameters

C333S185000

Reexamination Certificate

active

11125378

ABSTRACT:
An improved integrated LC resonator and methods for making and using the same are disclosed. The resonator includes (i) a first capacitor plate; (ii) an inductor over and in electrical communication with the first capacitor plate; and (iii) a second capacitor plate over and in electrical communication with the inductor. The method of making includes sequentially forming a first capacitor plate, a first dielectric layer thereon, a first via and an inductor, a second dielectric layer on the inductor, and a second via and a second capacitor plate. Each of the capacitor plates and the inductor are generally formed in different integrated circuit layers (for example, different metallization layers). Embodiments of the present invention can advantageously provide an integrated LC resonator tank having: (i) relatively high Q by reducing or minimizing parasitic effects; and (ii) relatively high shielding from the semiconductor substrate.

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