Optics: measuring and testing – By light interference – Rotation rate
Reexamination Certificate
2011-04-19
2011-04-19
Lee, Hwa S. A (Department: 2886)
Optics: measuring and testing
By light interference
Rotation rate
C356S073000
Reexamination Certificate
active
07929143
ABSTRACT:
An integrated interferometric gyroscope and accelerometer device. An example device includes a cantilever beam, a package having a post connected to one end of the beam, a piezoresistor driver, a piezoresistor sensor, and a semiconductor interferometric optical gyro. The piezoresistor driver is incorporated within the beam at a first area proximate to the post. The driver electro-thermally resonates the beam. The piezoresistor sensor is incorporated within the beam at the first area. The sensor piezoresitively senses a signal that relates to an acceleration force out-of-plane of the beam. The semiconductor interferometric optical gyro is also incorporated within the beam at a second area of the beam. The gyro senses rotational motion about an axis approximately equivalent to the acceleration force out-of-plane of the beam. The gyro includes a waveguide, a laser source and a light detector. The beam is formed from a semiconductor substrate.
REFERENCES:
patent: 3614677 (1971-10-01), Wilfinger
patent: 6801319 (2004-10-01), Szafraniec et al.
patent: 2008/0013094 (2008-01-01), Wilfinger
Bailey Eric
Wilfinger Ray
Wingard Carl
A Lee Hwa S.
Black Lowe & Graham PLLC
Honeywell International , Inc.
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